Thermo Scientific ESCALAB™ XI+

X-ray Photoelectron Spectrometer (XPS) Microprobe

Meet your demands for increased analytical performance and flexibility with the Thermo Scientific™ ESCALAB™ XI+ X-ray Photoelectron Spectrometer (XPS) Microprobe, which combines high sensitivity with high resolution quantitative imaging and multi-technique capability.


Equipped with a micro-focusing X-ray monochromator designed to deliver optimum XPS performance, the ESCALAB XI+ X-ray Photoelectron Spectrometer (XPS) Microprobe ensures maximum sample throughput. The multi-technique capability and availability of a range of preparation chambers and devices provides the solution to any surface analytical problem. Using the advanced Avantage data system for acquisition and data processing, maximum information is extracted from the data.

The ESCALAB XI+ X-ray Photoelectron Spectrometer (XPS) Microprobe Features:
• High sensitivity spectroscopy
• Small area XPS
• Depth profiling capability
• Angle resolved XPS
• Ion scattering spectroscopy (ISS) in base system
• Reflected electron energy loss spectroscopy (REELS) in base system
• “Preploc” chamber in base system
• Multi-technique analytical versatility
• Many sample preparation options
• Automated, unattended analysis
• Multiple sample analysis

X-ray Monochromator
• Twin-crystal, micro-focusing monochromator has a 500mm Rowland circle and uses an Al anode
• Sample X-ray spot size is selectable over a range of 200 to 900μm Lens,

Analyzer and Detector
• Lens/analyzer/detector combination makes the ESCALAB XI+ XPS Spectrometer unique for both imaging and small area XPS
• Two types of detectors ensures optimum detection for each type of analysis — two-dimensional detector for imaging and a detector based on channel electron multipliers for spectroscopy when high count rates are to be detected
• Lens is equipped with two, computer-controlled iris mechanisms — one allows the user to control the field of view of the lens down to < 20μm for small area analysis and the other to control the angular acceptance of the lens, which is essential for high-quality angle resolved XPS
• 180° hemispherical energy analyzer

Depth Profiling
• Digitally-controlled EX06 ion gun is a high-performance ion source even when using low energy ions
• Azimuthal sample rotation is available
• Multi-technique capability
• Other analytical techniques accommodated without compromise to the XPS performance
• Reverse power supplies for the lenses and analyzer using the EX06 ion gun (ion scattering spectroscopy (ISS) is always available)
• Electron gun can be operated at up to 1000V and provides an excellent source for REELS

Technique Options
• XPS with non-monochromatic X-rays
• AES (Auger electron spectroscopy)
• UPS (Ultra-violet photoelectron spectroscopy)

Vacuum System
• 5mm thick mu-metal analysis chamber maximizes efficiency of magnetic shielding
• Increased effectiveness compared to shielding methods that use internal or external shields

Sample Preparation
• Combined entry lock and preparation chamber form part of the base system
• Additional preparation chambers are available

Avantage Data System
• Integrates all aspects of the analysis, including instrument control, data acquisition, data processing and reporting
• Allows remote control and easy interfacing to third-party software such as Microsoft Word
• Manages total analysis process from sample to report


180° double focusing hemispherical analyzer
with dual detector system for spectroscopy and imaging.

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ESCALAB XI+ Applications

AES, SEM and SAM charge compensation

Surface Analysis, Effective Charge, Compensation for AES, SEM and SAM

The analysis of insulating materials by electron beam techniques such as Scanning Electron Microscopy (SEM), Auger Electron Spectroscopy (AES) and Scanning Auger Microscopy (SAM) has always proved difficult due to sample charging. This causes peak movement or secondary electron peaks to dominate the spectrum. Effective charge compensation for all surface analysis techniques requires that excess charge is removed and the surface is as close to ground potential as possible. This charge balance may be achieved in electron beam techniques by use of a flux of very low energy ions

Analysis of a Wound Dressing

ESCALAB 250Xi, Spectroscopic Imaging, Surface Analysis, Wound Dressing, XPS

The Thermo Scientific ESCALAB 250Xi has been used to measure the silver distribution in a wound dressing. This analysis requires the ability to produce images over a large area and at high resolution over a small area. The quantity of silver present in these dressings is small so high sensitivity is essential.

Silver containing wound dressings are now widely used to minimize the occurrence of bacterial infection in certain types of wound. The usefulness of these dressings depends upon the chemical and physical nature of the silver, which includes the way in which the silver is distributed over the dressing. The spectroscopic imaging capability in the ESCALAB 250Xi makes this an ideal instrument for assessing the quality of this type of material. It can be used, for example, to determine the distribution of the silver within the dressing on both a large and a small scale. Large scale spectroscopic imaging can be accomplished by stage mapping and small-scale, high-resolution imaging makes use of the parallel imaging capability of the ESCALAB 250Xi. The concentration of silver in these materials is very low, requiring the high sensitivity available from the ESCALAB 250Xi.

Analysis of Micromachined Devices

Key Words: Surface Analysis, High Spatial Resolution X-ray, Photoelectron Imaging (XPi), Rapid Spectral Information

Micromachined devices (MMD’s) are rapidly establishing themselves in sensor and micro-optical technologies. The fabrication of these devices uses techniques which are well established in the semiconductor industry. Samples are prepared from a silicon wafer onto which a silicon nitride layer is grown to a thickness of about 0.3 µm. Optical lithographic and wet etching techniques are then applied to the material to obtain distinctive patterns on the sample to a depth of approximately 12 µm. The feature size of these devices is such that a spatial resolution of about 1 to 2 µm is required to produce satisfactory images. Thermo Scientific ESCALAB 250 is particularly suited to the analysis of micromachined devices because of its high spatial resolution. Following the spectral acquisition, X-ray photoelectron images were collected from each of the major constituents over a field of view of 250 µm. The oxygen and nitrogen images are shown, along with an image overlay

More application notes are available by submitting the application request form