Thermo Scientific K-Alpha

Designed for Productivity, from Research to Routine

The K-Alpha spectrometer delivers much improved spectroscopic performance. This leap forward results in faster analysis times, improved element detection, and the possibility to acquire data at higher resolution yielding better chemical state identification. Analytical options include the revolutionary dual mode ion source, a vacuum transfer module for moving air-sensitive samples from a glove box to the system, and the tilt module for ARXPS data collection. Equipped with the Thermo Scientific™ Avantage Data System, the complete surface analysis software system, the K-Alpha+ has a range of software features designed to optimize data interpretation, data reporting and usability. The K-Alpha XPS system meets the requirements of both experienced XPS analysts and newcomers to the technique, bringing together high performance, monochromated XPS and sputter depth profiling, with intelligent automation and intuitive control.

Powerful Performance

• Selectable area spectroscopy
• Sputter depth profiling
• Micro-focused monochromator
• Snapshot acquisition
• High-resolution chemical state spectroscopy
• Insulator analysis
• Quantitative chemical imaging

Unparalleled Ease of Use
• Acquisition — spectra, images, profiles, line scans
• Interpretation — elemental and chemical state identification
• Processing — Quantification, peak fitting, real-time profile display, spectrum-image manipulation, PCA, phase analysis, TFA, NLLSF, PSF removal, optical/XPS image overlays
• Reporting — automatic report generation with simple export to other software packages
• Control — all hardware controlled from the Avantage software interface
• Avantage Indexer — data archive management
• Audit trail logging
• System performance logging
• Calibration on demand
• Full remote operation

Key Features
• Analyzer — 180° double focusing hemispherical analyzer with 128-channel detector
• X-ray source — Al Ka micro-focused monochromator with variable spot size (30-400µm in 5µm steps)
• Ion Gun — Energy range 100-4000eV
• Charge Compensation — Dual beam source
• Sample Handling — 4-axis sample stage, 60 x 60mm sample area, 20mm maximum sample thickness
• Vacuum System — 2x 260L/s turbo molecular pumps for entry and analysis chambers
• Options —Thermo Scientific™ MAGCIS™ Dual Beam Ion Source, vacuum transfer module, tilt module for ARXPS, sample bias module


Thermo Scientific K-Alpha is a fully integrated, monochromated
small-spot X-ray Photoelectron Spectrometer (XPS) system.

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K-Alpha Applications

Analysis of As, P dopant distribution of NMOS transistor by FESTEM & EDS

Keywords: semiconductor, dopant, FESTEM, EDS, Quant Map, MSA, COMPASS, As, P

The concentration and distribution of dopant atoms in the gate region of a semiconductor device, for example P and As in an NMOS transistor, directly affects the device performance. The characterization of these dopants, therefore, is critical to both manufacturing process control and to research and development efforts into next generation transistors. Unfortunately, the typical concentration of these dopants is quite low (less than 1000 parts per million) and the doped regions quite small (< 5 % of total region). This creates challenges in detecting and properly characterizing the dopant atom distributions. Consider, for example, Fig. 1 which shows the spectrum collected from a typical Si device structure along with the properly quantified location of the doped Si regions. The challenge of manually identifying and spatially locating the As and P dopants from the collected spectrum is apparent

Analysis of electrode materials for lithium ion batteries

K-Alpha, Nexsa, air-sensitive, anode, cathode, electrodes, inert transfer, Li-ion battery, lithium, NMC, vacuum transfer

Description The Thermo Scientific™ Nexsa™ XPS System was used to analyze the surface of lithiumion battery electrodes. Due to the air-sensitive nature of these materials, the Nexsa vacuum transfer module was used to safely transport the samples from a glove box to the instrument without exposure to ambient atmosphere. This ensured that the surface was as representative of the electrode material as removed from the cell.

Analyzing Contact Lens Samples

Keywords K-Alpha, XPS, Characterization, Contact Lens, Surface Analysis

The Thermo Scientific K-Alpha was used to analyze the elemental and chemical composition of a set of contact lens samples. The Avantage Data System can be programmed to characterize a large batch of samples for routine analysis and output the results in simple format

The design of the contact lens is crucial for its usability. The lenses are in close contact with the eye, sometimes for extended periods of time, so they have to be safe and comfortable to use. Contact lenses have been subjected to different kinds of surface treatments to improve their surface properties with the intent to make the surfaces more hydrophilic, deposit resistant or scratch resistant. Optimization of the design of the contact lens requires the characterization of the surface. X-ray Photoelectron Spectroscopy (XPS) is the ideal analytical method for investigating elemental and chemical composition of the surface. It can also provide information about the coating layers (coating uniformity and thickness) and the interfacial chemistry. In conjunction with automated processing, it can be used to investigate coating thickness across a group of lenses.

More application notes are available by submitting the application request form