Offer fully automated multi-technique analysis along with high throughput without sacrificing research grade results with the Thermo Scientific™ Nexsa™ X-Ray Photoelectron Spectrometer (XPS) System. Integration of multiple analytical techniques like ISS, UPS, REELS and Raman allows users to conduct true correlative analysis, unlocking the potential for further advances in microelectronics, ultra-thin films, nanotechnology development and many other applications.
Material Analysis and Development
The Nexsa spectrometer delivers flexibility to maximize the potential of your material. Flexibility in the forms of multiple-integrated technique options for true correlative data analysis and high throughput while maintain research quality results.
Powerful Performance from Standard Features:
• Insulator analysis
• High performance spectroscopy
• Depth profiling
• Multi-technique integration
• Dual-mode ion source for expanded depth profiling capabilities
• Tilt Module for ARXPS measurements
• Avantage Software for instrument control, data processing, and reporting
• Small spot analysis
Optional Upgrades: Add any of the integrated and fully automated techniques to your analysis. Run at the touch of a button.
• ISS: Ion scattering spectroscopy is a technique in which a beam of ions is scattered by a surface
• UPS: Ultraviolet photoelectron spectroscopy refers to the measurement of kinetic energy spectra of photoelectrons emitted by molecules which have absorbed ultraviolet photons, in order to determine molecular orbital energies in the valence region
• Raman: Spectroscopic technique used to in chemistry to provide a structural fingerprint
• REELS: Reflection electron energy loss spectroscopy
Bring sample features into focus with SnapMap's optical view. The optical view helps you pint point areas of interest quickly while developing a fully focused XPS image to further define your experiment.
1. X-rays illuminate a small area on the sample.
2. Photo electrons from that small area are collected and focused into the analyzer
3. Spectra are continually acquired as the stage is moving
4. Stage position monitored throughout data acquisition, positions used to generate SnapMap
• Glass coatings
• Metals & oxides
• Solar cells
• Thin films
Key words: XPS, Raman spectroscopy, material characterisation, surface analysis,
minerals, multitechnique, Nexsa, iXR
X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy are two popular analytical techniques due to their flexibility, ease of use, and the wealth of information they provide. Until recently analysis of a material with both of these techniques required the use of two different instruments, however the development of coincident XPSRaman allows for straightforward and quick utilisation of both techniques opening up new exciting materials characterisation opportunities.
Keywords Semiconductor, ISS, LEIS, REELS, XPS, Band gap, ALD, Gate
dielectric, Nexsa, ESCALAB
Building on the success of the Thermo Scientific™ K-Alpha XPS system, the Thermo Scientific™ Nexsa XPS System adds the capability of multitechnique analysis to the already fully-automated and user-friendly instrument. In addition to XPS Nexsa can provide coincident analysis using UV photoelectron spectroscopy (UPS), ion scattering spectroscopy (ISS), reflected electron energy loss spectroscopy (REELS), and Raman spectroscopy. This advantage of the Nexsa is used to investigate a series of samples, consisting of thin layers of HfO2 deposited by increasing numbers of Atomic Layer Deposition (ALD) cycles. XPS is firstly used to quantify the amount of hafnium deposited onto the substrate and measure the thickness of the HfO2 and SiO2 layers. Subsequent analyses using ISS and REELS, are then performed to provide surface coverage and band gap measurements respectively.
Keywords SnapMap, rapid imaging, XPS, small spot, Thermo Scientific Nexsa XPS System, scanned
XPS imaging, Thermo Scientific K-Alpha XPS System
SnapMap technology, available in the Thermo Scientific™ Nexsa™ and K-Alpha™ XPS systems, offers the surface analyst the ability to produce high resolution, large area, XPS images within minutes. To achieve this the sample stage is moved though the stationary X-ray beam so that the X-ray spot is effectively rastered across the selected area of the sample surface. The stage movement is synchronized with the high performance spectrometer which collects snapshot XPS spectra continuously during rastering. The result of this process is the production of a high resolution XPS image of the sample surface with each pixel point representing an individual snapshot XPS spectrum. Unlike scanning the X-ray beam, the stage raster approach keeps the analysis area constant during the analysis, ensuring that all areas of the image have the same definition.